Korea Advanced Institute of Science and Technology(KAIST) via Coursera |
Go to Course: https://www.coursera.org/learn/semiconductor-process-1
Learn about modern semiconductor process
Week 1 Overview of MOSFET theory
Week 2 CMOS Process IntegrationWeek 3 Cleanroom, RCA Cleaning Crystal GrowthWeek 4 Diffusion & DopingWeek 5 OxidationWeek 6 Ion ImplantationWeek 7 LithographyWeek 8 EUV LithographyThis course aims to provide a general understanding of semiconductor process. This course explores the principles and basic theory of semiconductor device and process. Furthermore, the students will learn the overall semiconductor process such as oxidation, diffusion, ion implantation, lithography, etching, thin film deposition, plasma, metallization, and packaging. The lecture notes can be downloaded with registration, that helps students watch the videos. There are quiz problems to check
Great content. I would like to see more challenging quizzes
The course should have a few numericals. The content is interesting, easy to follow, and very good.
Very informative, well structured, and knowledgeable professor